4/21/2012	8:14:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2012	8:14:46 AM	Recipe started at 8:14 AM
4/21/2012	8:14:46 AM	Helium valve closed
4/21/2012	8:14:46 AM	H2 valve closed
4/21/2012	8:14:46 AM	BCl3 valve closed
4/21/2012	8:14:46 AM	PH3 valve closed
4/21/2012	8:14:46 AM	SiCl4 pre valve closed
4/21/2012	8:14:46 AM	SiCl4 post valve closed
4/21/2012	8:14:46 AM	Main Vac valve closed
4/21/2012	8:14:46 AM	Bypass valve closed
4/21/2012	8:14:46 AM	Bubbler valve closed
4/21/2012	8:14:46 AM	Helium MFC set to  0.000000
4/21/2012	8:14:46 AM	H2 MFC set to  0.000000
4/21/2012	8:14:46 AM	BCl3 MFC set to  0.000000
4/21/2012	8:14:46 AM	PH3 MFC set to  0.000000
4/21/2012	8:14:46 AM	SiCl4 MFC set to  0.000000
4/21/2012	8:14:46 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	8:14:46 AM	Tube furnace set to 0
4/21/2012	8:14:49 AM	H2 valve closed
4/21/2012	8:14:49 AM	BCl3 valve closed
4/21/2012	8:14:49 AM	PH3 valve closed
4/21/2012	8:14:49 AM	SiCl4 pre valve closed
4/21/2012	8:14:49 AM	SiCl4 post valve closed
4/21/2012	8:14:49 AM	Main Vac valve closed
4/21/2012	8:14:49 AM	Bypass valve closed
4/21/2012	8:14:49 AM	Bubbler valve closed
4/21/2012	8:14:49 AM	Helium valve opened
4/21/2012	8:14:49 AM	Helium MFC set to  500.000000
4/21/2012	8:14:49 AM	H2 MFC set to  0.000000
4/21/2012	8:14:49 AM	BCl3 MFC set to  0.000000
4/21/2012	8:14:49 AM	PH3 MFC set to  0.000000
4/21/2012	8:14:49 AM	SiCl4 MFC set to  0.000000
4/21/2012	8:14:49 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	8:14:49 AM	Tube furnace set to 0
4/21/2012	8:15:54 AM	Helium valve closed
4/21/2012	8:15:54 AM	H2 valve closed
4/21/2012	8:15:54 AM	BCl3 valve closed
4/21/2012	8:15:54 AM	PH3 valve closed
4/21/2012	8:15:54 AM	SiCl4 pre valve closed
4/21/2012	8:15:54 AM	SiCl4 post valve closed
4/21/2012	8:15:54 AM	Main Vac valve closed
4/21/2012	8:15:54 AM	Bypass valve closed
4/21/2012	8:15:54 AM	Bubbler valve closed
4/21/2012	8:15:54 AM	Helium MFC set to  0.000000
4/21/2012	8:15:54 AM	H2 MFC set to  0.000000
4/21/2012	8:15:54 AM	BCl3 MFC set to  0.000000
4/21/2012	8:15:54 AM	PH3 MFC set to  0.000000
4/21/2012	8:15:54 AM	SiCl4 MFC set to  0.000000
4/21/2012	8:15:54 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	8:15:54 AM	Tube furnace set to 0
4/21/2012	8:15:55 AM	Run finished at 8:15 AM
4/21/2012	8:15:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2012	8:24:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2012	8:24:08 AM	Recipe started at 8:24 AM
4/21/2012	8:24:08 AM	Helium valve closed
4/21/2012	8:24:08 AM	H2 valve closed
4/21/2012	8:24:08 AM	BCl3 valve closed
4/21/2012	8:24:08 AM	PH3 valve closed
4/21/2012	8:24:08 AM	SiCl4 pre valve closed
4/21/2012	8:24:08 AM	SiCl4 post valve closed
4/21/2012	8:24:08 AM	Main Vac valve closed
4/21/2012	8:24:08 AM	Bubbler valve closed
4/21/2012	8:24:08 AM	Bypass valve opened
4/21/2012	8:24:08 AM	Helium MFC set to  0.000000
4/21/2012	8:24:08 AM	H2 MFC set to  0.000000
4/21/2012	8:24:08 AM	BCl3 MFC set to  0.000000
4/21/2012	8:24:08 AM	PH3 MFC set to  0.000000
4/21/2012	8:24:08 AM	SiCl4 MFC set to  0.000000
4/21/2012	8:24:08 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	8:24:08 AM	Tube furnace set to 0
4/21/2012	8:25:12 AM	Helium valve closed
4/21/2012	8:25:12 AM	H2 valve closed
4/21/2012	8:25:12 AM	BCl3 valve closed
4/21/2012	8:25:12 AM	PH3 valve closed
4/21/2012	8:25:12 AM	SiCl4 pre valve closed
4/21/2012	8:25:12 AM	SiCl4 post valve closed
4/21/2012	8:25:12 AM	Main Vac valve closed
4/21/2012	8:25:12 AM	Bubbler valve closed
4/21/2012	8:25:12 AM	Bypass valve opened
4/21/2012	8:25:12 AM	Helium MFC set to  0.000000
4/21/2012	8:25:12 AM	H2 MFC set to  0.000000
4/21/2012	8:25:12 AM	BCl3 MFC set to  0.000000
4/21/2012	8:25:12 AM	PH3 MFC set to  0.000000
4/21/2012	8:25:12 AM	SiCl4 MFC set to  0.000000
4/21/2012	8:25:12 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	8:25:12 AM	Tube furnace set to 0
4/21/2012	8:26:12 AM	Helium valve closed
4/21/2012	8:26:12 AM	H2 valve closed
4/21/2012	8:26:12 AM	BCl3 valve closed
4/21/2012	8:26:12 AM	PH3 valve closed
4/21/2012	8:26:12 AM	SiCl4 pre valve closed
4/21/2012	8:26:12 AM	SiCl4 post valve closed
4/21/2012	8:26:12 AM	Bypass valve closed
4/21/2012	8:26:12 AM	Bubbler valve closed
4/21/2012	8:26:12 AM	Main Vac valve opened
4/21/2012	8:26:12 AM	Helium MFC set to  0.000000
4/21/2012	8:26:12 AM	H2 MFC set to  0.000000
4/21/2012	8:26:12 AM	BCl3 MFC set to  0.000000
4/21/2012	8:26:12 AM	PH3 MFC set to  0.000000
4/21/2012	8:26:12 AM	SiCl4 MFC set to  0.000000
4/21/2012	8:26:12 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	8:26:13 AM	Tube furnace set to 0
4/21/2012	8:26:14 AM	Run finished at 8:26 AM
4/21/2012	8:26:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2012	9:16:13 AM	Recipe started at 9:16 AM
4/21/2012	9:16:13 AM	Helium valve closed
4/21/2012	9:16:13 AM	H2 valve closed
4/21/2012	9:16:13 AM	BCl3 valve closed
4/21/2012	9:16:13 AM	PH3 valve closed
4/21/2012	9:16:13 AM	SiCl4 pre valve closed
4/21/2012	9:16:13 AM	SiCl4 post valve closed
4/21/2012	9:16:13 AM	Bypass valve closed
4/21/2012	9:16:13 AM	Bubbler valve closed
4/21/2012	9:16:13 AM	Main Vac valve opened
4/21/2012	9:16:13 AM	Helium MFC set to  0.000000
4/21/2012	9:16:13 AM	H2 MFC set to  0.000000
4/21/2012	9:16:13 AM	BCl3 MFC set to  0.000000
4/21/2012	9:16:13 AM	PH3 MFC set to  0.000000
4/21/2012	9:16:13 AM	SiCl4 MFC set to  0.000000
4/21/2012	9:16:13 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	9:16:13 AM	Tube furnace set to 0
4/21/2012	10:01:13 AM	Helium valve closed
4/21/2012	10:01:13 AM	H2 valve closed
4/21/2012	10:01:13 AM	BCl3 valve closed
4/21/2012	10:01:13 AM	PH3 valve closed
4/21/2012	10:01:13 AM	SiCl4 pre valve closed
4/21/2012	10:01:13 AM	SiCl4 post valve closed
4/21/2012	10:01:13 AM	Main Vac valve closed
4/21/2012	10:01:13 AM	Bypass valve closed
4/21/2012	10:01:13 AM	Bubbler valve closed
4/21/2012	10:01:13 AM	Helium MFC set to  0.000000
4/21/2012	10:01:13 AM	H2 MFC set to  0.000000
4/21/2012	10:01:13 AM	BCl3 MFC set to  0.000000
4/21/2012	10:01:13 AM	PH3 MFC set to  0.000000
4/21/2012	10:01:13 AM	SiCl4 MFC set to  0.000000
4/21/2012	10:01:13 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	10:01:14 AM	Tube furnace set to 0
4/21/2012	10:01:17 AM	Helium valve closed
4/21/2012	10:01:17 AM	BCl3 valve closed
4/21/2012	10:01:17 AM	PH3 valve closed
4/21/2012	10:01:17 AM	SiCl4 pre valve closed
4/21/2012	10:01:17 AM	SiCl4 post valve closed
4/21/2012	10:01:17 AM	Main Vac valve closed
4/21/2012	10:01:17 AM	Bypass valve closed
4/21/2012	10:01:17 AM	Bubbler valve closed
4/21/2012	10:01:17 AM	H2 valve opened
4/21/2012	10:01:17 AM	Helium MFC set to  0.000000
4/21/2012	10:01:17 AM	H2 MFC set to  500.000000
4/21/2012	10:01:17 AM	BCl3 MFC set to  0.000000
4/21/2012	10:01:17 AM	PH3 MFC set to  0.000000
4/21/2012	10:01:17 AM	SiCl4 MFC set to  0.000000
4/21/2012	10:01:17 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	10:01:17 AM	Tube furnace set to 0
4/21/2012	10:02:25 AM	Helium valve closed
4/21/2012	10:02:25 AM	BCl3 valve closed
4/21/2012	10:02:25 AM	PH3 valve closed
4/21/2012	10:02:25 AM	SiCl4 pre valve closed
4/21/2012	10:02:25 AM	SiCl4 post valve closed
4/21/2012	10:02:25 AM	Main Vac valve closed
4/21/2012	10:02:25 AM	Bypass valve closed
4/21/2012	10:02:25 AM	H2 valve opened
4/21/2012	10:02:25 AM	Bubbler valve opened
4/21/2012	10:02:25 AM	Helium MFC set to  0.000000
4/21/2012	10:02:25 AM	H2 MFC set to  500.000000
4/21/2012	10:02:25 AM	BCl3 MFC set to  0.000000
4/21/2012	10:02:25 AM	PH3 MFC set to  0.000000
4/21/2012	10:02:25 AM	SiCl4 MFC set to  0.000000
4/21/2012	10:02:25 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	10:02:25 AM	Tube furnace set to 0
4/21/2012	10:02:26 AM	Helium valve closed
4/21/2012	10:02:26 AM	BCl3 valve closed
4/21/2012	10:02:26 AM	PH3 valve closed
4/21/2012	10:02:26 AM	SiCl4 pre valve closed
4/21/2012	10:02:26 AM	SiCl4 post valve closed
4/21/2012	10:02:26 AM	Main Vac valve closed
4/21/2012	10:02:26 AM	Bypass valve closed
4/21/2012	10:02:26 AM	H2 valve opened
4/21/2012	10:02:26 AM	Bubbler valve opened
4/21/2012	10:02:26 AM	Helium MFC set to  0.000000
4/21/2012	10:02:26 AM	H2 MFC set to  500.000000
4/21/2012	10:02:26 AM	BCl3 MFC set to  0.000000
4/21/2012	10:02:26 AM	PH3 MFC set to  0.000000
4/21/2012	10:02:26 AM	SiCl4 MFC set to  0.000000
4/21/2012	10:02:26 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	10:02:26 AM	Tube furnace set to 1000
4/21/2012	10:27:26 AM	Helium valve closed
4/21/2012	10:27:26 AM	PH3 valve closed
4/21/2012	10:27:26 AM	Main Vac valve closed
4/21/2012	10:27:26 AM	Bypass valve closed
4/21/2012	10:27:26 AM	H2 valve opened
4/21/2012	10:27:26 AM	BCl3 valve opened
4/21/2012	10:27:26 AM	SiCl4 pre valve opened
4/21/2012	10:27:26 AM	SiCl4 post valve opened
4/21/2012	10:27:26 AM	Bubbler valve opened
4/21/2012	10:27:26 AM	Helium MFC set to  0.000000
4/21/2012	10:27:26 AM	H2 MFC set to  450.000000
4/21/2012	10:27:26 AM	BCl3 MFC set to  1.000000
4/21/2012	10:27:26 AM	PH3 MFC set to  0.000000
4/21/2012	10:27:26 AM	SiCl4 MFC set to  50.000000
4/21/2012	10:27:26 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	10:27:26 AM	Tube furnace set to 1000
4/21/2012	10:50:26 AM	Helium valve closed
4/21/2012	10:50:26 AM	BCl3 valve closed
4/21/2012	10:50:26 AM	Main Vac valve closed
4/21/2012	10:50:26 AM	Bypass valve closed
4/21/2012	10:50:26 AM	H2 valve opened
4/21/2012	10:50:26 AM	PH3 valve opened
4/21/2012	10:50:26 AM	SiCl4 pre valve opened
4/21/2012	10:50:26 AM	SiCl4 post valve opened
4/21/2012	10:50:26 AM	Bubbler valve opened
4/21/2012	10:50:26 AM	Helium MFC set to  0.000000
4/21/2012	10:50:26 AM	H2 MFC set to  445.000000
4/21/2012	10:50:26 AM	BCl3 MFC set to  0.000000
4/21/2012	10:50:26 AM	PH3 MFC set to  20.000000
4/21/2012	10:50:26 AM	SiCl4 MFC set to  50.000000
4/21/2012	10:50:26 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	10:50:27 AM	Tube furnace set to 1000
4/21/2012	10:52:27 AM	Helium valve closed
4/21/2012	10:52:27 AM	BCl3 valve closed
4/21/2012	10:52:27 AM	PH3 valve closed
4/21/2012	10:52:27 AM	SiCl4 pre valve closed
4/21/2012	10:52:27 AM	SiCl4 post valve closed
4/21/2012	10:52:27 AM	Main Vac valve closed
4/21/2012	10:52:27 AM	Bypass valve closed
4/21/2012	10:52:27 AM	H2 valve opened
4/21/2012	10:52:27 AM	Bubbler valve opened
4/21/2012	10:52:27 AM	Helium MFC set to  0.000000
4/21/2012	10:52:27 AM	H2 MFC set to  500.000000
4/21/2012	10:52:27 AM	BCl3 MFC set to  0.000000
4/21/2012	10:52:27 AM	PH3 MFC set to  0.000000
4/21/2012	10:52:27 AM	SiCl4 MFC set to  0.000000
4/21/2012	10:52:27 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	10:52:27 AM	Tube furnace set to 750
4/21/2012	11:07:27 AM	H2 valve closed
4/21/2012	11:07:27 AM	BCl3 valve closed
4/21/2012	11:07:27 AM	PH3 valve closed
4/21/2012	11:07:27 AM	SiCl4 pre valve closed
4/21/2012	11:07:27 AM	SiCl4 post valve closed
4/21/2012	11:07:27 AM	Main Vac valve closed
4/21/2012	11:07:27 AM	Bypass valve closed
4/21/2012	11:07:27 AM	Helium valve opened
4/21/2012	11:07:27 AM	Bubbler valve opened
4/21/2012	11:07:27 AM	Helium MFC set to  500.000000
4/21/2012	11:07:27 AM	H2 MFC set to  0.000000
4/21/2012	11:07:27 AM	BCl3 MFC set to  0.000000
4/21/2012	11:07:27 AM	PH3 MFC set to  0.000000
4/21/2012	11:07:27 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:07:27 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	11:07:27 AM	Tube furnace set to 0
4/21/2012	11:27:27 AM	Helium valve closed
4/21/2012	11:27:27 AM	H2 valve closed
4/21/2012	11:27:27 AM	BCl3 valve closed
4/21/2012	11:27:27 AM	PH3 valve closed
4/21/2012	11:27:27 AM	SiCl4 pre valve closed
4/21/2012	11:27:27 AM	SiCl4 post valve closed
4/21/2012	11:27:27 AM	Main Vac valve closed
4/21/2012	11:27:27 AM	Bypass valve closed
4/21/2012	11:27:27 AM	Bubbler valve closed
4/21/2012	11:27:27 AM	Helium MFC set to  0.000000
4/21/2012	11:27:27 AM	H2 MFC set to  0.000000
4/21/2012	11:27:27 AM	BCl3 MFC set to  0.000000
4/21/2012	11:27:27 AM	PH3 MFC set to  0.000000
4/21/2012	11:27:27 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:27:27 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	11:27:27 AM	Tube furnace set to 0
4/21/2012	11:47:27 AM	Helium valve closed
4/21/2012	11:47:27 AM	H2 valve closed
4/21/2012	11:47:27 AM	BCl3 valve closed
4/21/2012	11:47:27 AM	PH3 valve closed
4/21/2012	11:47:27 AM	SiCl4 pre valve closed
4/21/2012	11:47:27 AM	SiCl4 post valve closed
4/21/2012	11:47:27 AM	Main Vac valve closed
4/21/2012	11:47:27 AM	Bubbler valve closed
4/21/2012	11:47:27 AM	Bypass valve opened
4/21/2012	11:47:27 AM	Helium MFC set to  0.000000
4/21/2012	11:47:27 AM	H2 MFC set to  0.000000
4/21/2012	11:47:27 AM	BCl3 MFC set to  0.000000
4/21/2012	11:47:27 AM	PH3 MFC set to  0.000000
4/21/2012	11:47:27 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:47:27 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	11:47:27 AM	Tube furnace set to 0
4/21/2012	11:48:13 AM	Helium valve closed
4/21/2012	11:48:13 AM	H2 valve closed
4/21/2012	11:48:13 AM	BCl3 valve closed
4/21/2012	11:48:13 AM	PH3 valve closed
4/21/2012	11:48:13 AM	SiCl4 pre valve closed
4/21/2012	11:48:13 AM	SiCl4 post valve closed
4/21/2012	11:48:13 AM	Main Vac valve closed
4/21/2012	11:48:13 AM	Bubbler valve closed
4/21/2012	11:48:13 AM	Bypass valve opened
4/21/2012	11:48:13 AM	Helium MFC set to  0.000000
4/21/2012	11:48:13 AM	H2 MFC set to  0.000000
4/21/2012	11:48:13 AM	BCl3 MFC set to  0.000000
4/21/2012	11:48:13 AM	PH3 MFC set to  0.000000
4/21/2012	11:48:13 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:48:13 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	11:48:14 AM	Tube furnace set to 0
4/21/2012	11:49:14 AM	Helium valve closed
4/21/2012	11:49:14 AM	H2 valve closed
4/21/2012	11:49:14 AM	BCl3 valve closed
4/21/2012	11:49:14 AM	PH3 valve closed
4/21/2012	11:49:14 AM	SiCl4 pre valve closed
4/21/2012	11:49:14 AM	SiCl4 post valve closed
4/21/2012	11:49:14 AM	Bypass valve closed
4/21/2012	11:49:14 AM	Bubbler valve closed
4/21/2012	11:49:14 AM	Main Vac valve opened
4/21/2012	11:49:14 AM	Helium MFC set to  0.000000
4/21/2012	11:49:14 AM	H2 MFC set to  0.000000
4/21/2012	11:49:14 AM	BCl3 MFC set to  0.000000
4/21/2012	11:49:14 AM	PH3 MFC set to  0.000000
4/21/2012	11:49:14 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:49:14 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	11:49:14 AM	Tube furnace set to 0
4/21/2012	11:56:42 AM	Run aborted at 11:56 AM
4/21/2012	11:56:42 AM	Helium valve closed
4/21/2012	11:56:42 AM	H2 valve closed
4/21/2012	11:56:42 AM	BCl3 valve closed
4/21/2012	11:56:42 AM	PH3 valve closed
4/21/2012	11:56:42 AM	SiCl4 pre valve closed
4/21/2012	11:56:42 AM	SiCl4 post valve closed
4/21/2012	11:56:42 AM	Bypass valve closed
4/21/2012	11:56:42 AM	Main Vac valve closed
4/21/2012	11:56:42 AM	Bubbler valve closed
4/21/2012	11:56:42 AM	Helium MFC set to  0.000000
4/21/2012	11:56:42 AM	H2 MFC set to  0.000000
4/21/2012	11:56:42 AM	BCl3 MFC set to  0.000000
4/21/2012	11:56:42 AM	PH3 MFC set to  0.000000
4/21/2012	11:56:42 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:56:43 AM	Tube furnace set to 0
4/21/2012	11:56:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2012	11:56:45 AM	Recipe started at 11:56 AM
4/21/2012	11:56:45 AM	Helium valve closed
4/21/2012	11:56:45 AM	H2 valve closed
4/21/2012	11:56:45 AM	BCl3 valve closed
4/21/2012	11:56:45 AM	PH3 valve closed
4/21/2012	11:56:45 AM	SiCl4 pre valve closed
4/21/2012	11:56:45 AM	SiCl4 post valve closed
4/21/2012	11:56:45 AM	Main Vac valve closed
4/21/2012	11:56:45 AM	Bypass valve closed
4/21/2012	11:56:45 AM	Bubbler valve closed
4/21/2012	11:56:45 AM	Helium MFC set to  0.000000
4/21/2012	11:56:45 AM	H2 MFC set to  0.000000
4/21/2012	11:56:45 AM	BCl3 MFC set to  0.000000
4/21/2012	11:56:45 AM	PH3 MFC set to  0.000000
4/21/2012	11:56:45 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:56:45 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	11:56:45 AM	Tube furnace set to 0
4/21/2012	11:56:48 AM	H2 valve closed
4/21/2012	11:56:48 AM	BCl3 valve closed
4/21/2012	11:56:48 AM	PH3 valve closed
4/21/2012	11:56:48 AM	SiCl4 pre valve closed
4/21/2012	11:56:48 AM	SiCl4 post valve closed
4/21/2012	11:56:48 AM	Main Vac valve closed
4/21/2012	11:56:48 AM	Bypass valve closed
4/21/2012	11:56:48 AM	Bubbler valve closed
4/21/2012	11:56:48 AM	Helium valve opened
4/21/2012	11:56:48 AM	Helium MFC set to  500.000000
4/21/2012	11:56:48 AM	H2 MFC set to  0.000000
4/21/2012	11:56:48 AM	BCl3 MFC set to  0.000000
4/21/2012	11:56:48 AM	PH3 MFC set to  0.000000
4/21/2012	11:56:48 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:56:48 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	11:56:48 AM	Tube furnace set to 0
4/21/2012	11:57:49 AM	Helium valve closed
4/21/2012	11:57:49 AM	H2 valve closed
4/21/2012	11:57:49 AM	BCl3 valve closed
4/21/2012	11:57:49 AM	PH3 valve closed
4/21/2012	11:57:49 AM	SiCl4 pre valve closed
4/21/2012	11:57:49 AM	SiCl4 post valve closed
4/21/2012	11:57:49 AM	Main Vac valve closed
4/21/2012	11:57:49 AM	Bypass valve closed
4/21/2012	11:57:49 AM	Bubbler valve closed
4/21/2012	11:57:49 AM	Helium MFC set to  0.000000
4/21/2012	11:57:49 AM	H2 MFC set to  0.000000
4/21/2012	11:57:49 AM	BCl3 MFC set to  0.000000
4/21/2012	11:57:49 AM	PH3 MFC set to  0.000000
4/21/2012	11:57:49 AM	SiCl4 MFC set to  0.000000
4/21/2012	11:57:49 AM	Bypass solenoid MFC set to  0.000000
4/21/2012	11:57:49 AM	Tube furnace set to 0
4/21/2012	11:57:50 AM	Run finished at 11:57 AM
4/21/2012	11:57:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2012	12:00:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2012	12:00:06 PM	Recipe started at 12:00 PM
4/21/2012	12:00:06 PM	Helium valve closed
4/21/2012	12:00:06 PM	H2 valve closed
4/21/2012	12:00:06 PM	BCl3 valve closed
4/21/2012	12:00:06 PM	PH3 valve closed
4/21/2012	12:00:07 PM	SiCl4 pre valve closed
4/21/2012	12:00:07 PM	SiCl4 post valve closed
4/21/2012	12:00:07 PM	Main Vac valve closed
4/21/2012	12:00:07 PM	Bypass valve closed
4/21/2012	12:00:07 PM	Bubbler valve closed
4/21/2012	12:00:07 PM	Helium MFC set to  0.000000
4/21/2012	12:00:07 PM	H2 MFC set to  0.000000
4/21/2012	12:00:07 PM	BCl3 MFC set to  0.000000
4/21/2012	12:00:07 PM	PH3 MFC set to  0.000000
4/21/2012	12:00:07 PM	SiCl4 MFC set to  0.000000
4/21/2012	12:00:07 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	12:00:07 PM	Tube furnace set to 0
4/21/2012	12:00:10 PM	H2 valve closed
4/21/2012	12:00:10 PM	BCl3 valve closed
4/21/2012	12:00:10 PM	PH3 valve closed
4/21/2012	12:00:10 PM	SiCl4 pre valve closed
4/21/2012	12:00:10 PM	SiCl4 post valve closed
4/21/2012	12:00:10 PM	Main Vac valve closed
4/21/2012	12:00:10 PM	Bypass valve closed
4/21/2012	12:00:10 PM	Bubbler valve closed
4/21/2012	12:00:10 PM	Helium valve opened
4/21/2012	12:00:10 PM	Helium MFC set to  500.000000
4/21/2012	12:00:10 PM	H2 MFC set to  0.000000
4/21/2012	12:00:10 PM	BCl3 MFC set to  0.000000
4/21/2012	12:00:10 PM	PH3 MFC set to  0.000000
4/21/2012	12:00:10 PM	SiCl4 MFC set to  0.000000
4/21/2012	12:00:10 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	12:00:10 PM	Tube furnace set to 0
4/21/2012	12:00:11 PM	Helium valve closed
4/21/2012	12:00:11 PM	H2 valve closed
4/21/2012	12:00:11 PM	BCl3 valve closed
4/21/2012	12:00:11 PM	PH3 valve closed
4/21/2012	12:00:11 PM	SiCl4 pre valve closed
4/21/2012	12:00:11 PM	SiCl4 post valve closed
4/21/2012	12:00:11 PM	Main Vac valve closed
4/21/2012	12:00:11 PM	Bypass valve closed
4/21/2012	12:00:11 PM	Bubbler valve closed
4/21/2012	12:00:11 PM	Helium MFC set to  0.000000
4/21/2012	12:00:11 PM	H2 MFC set to  0.000000
4/21/2012	12:00:11 PM	BCl3 MFC set to  0.000000
4/21/2012	12:00:11 PM	PH3 MFC set to  0.000000
4/21/2012	12:00:11 PM	SiCl4 MFC set to  0.000000
4/21/2012	12:00:11 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	12:00:11 PM	Tube furnace set to 0
4/21/2012	12:00:12 PM	Run finished at 12:00 PM
4/21/2012	12:00:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2012	12:05:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2012	12:05:15 PM	Recipe started at 12:05 PM
4/21/2012	12:05:15 PM	Helium valve closed
4/21/2012	12:05:15 PM	H2 valve closed
4/21/2012	12:05:15 PM	BCl3 valve closed
4/21/2012	12:05:15 PM	PH3 valve closed
4/21/2012	12:05:15 PM	SiCl4 pre valve closed
4/21/2012	12:05:15 PM	SiCl4 post valve closed
4/21/2012	12:05:15 PM	Main Vac valve closed
4/21/2012	12:05:15 PM	Bubbler valve closed
4/21/2012	12:05:15 PM	Bypass valve opened
4/21/2012	12:05:15 PM	Helium MFC set to  0.000000
4/21/2012	12:05:15 PM	H2 MFC set to  0.000000
4/21/2012	12:05:15 PM	BCl3 MFC set to  0.000000
4/21/2012	12:05:15 PM	PH3 MFC set to  0.000000
4/21/2012	12:05:15 PM	SiCl4 MFC set to  0.000000
4/21/2012	12:05:15 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	12:05:15 PM	Tube furnace set to 0
4/21/2012	12:06:17 PM	Helium valve closed
4/21/2012	12:06:17 PM	H2 valve closed
4/21/2012	12:06:17 PM	BCl3 valve closed
4/21/2012	12:06:17 PM	PH3 valve closed
4/21/2012	12:06:17 PM	SiCl4 pre valve closed
4/21/2012	12:06:17 PM	SiCl4 post valve closed
4/21/2012	12:06:17 PM	Main Vac valve closed
4/21/2012	12:06:17 PM	Bubbler valve closed
4/21/2012	12:06:17 PM	Bypass valve opened
4/21/2012	12:06:17 PM	Helium MFC set to  0.000000
4/21/2012	12:06:17 PM	H2 MFC set to  0.000000
4/21/2012	12:06:17 PM	BCl3 MFC set to  0.000000
4/21/2012	12:06:17 PM	PH3 MFC set to  0.000000
4/21/2012	12:06:17 PM	SiCl4 MFC set to  0.000000
4/21/2012	12:06:17 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	12:06:17 PM	Tube furnace set to 0
4/21/2012	12:07:17 PM	Helium valve closed
4/21/2012	12:07:17 PM	H2 valve closed
4/21/2012	12:07:17 PM	BCl3 valve closed
4/21/2012	12:07:17 PM	PH3 valve closed
4/21/2012	12:07:17 PM	SiCl4 pre valve closed
4/21/2012	12:07:17 PM	SiCl4 post valve closed
4/21/2012	12:07:17 PM	Bypass valve closed
4/21/2012	12:07:17 PM	Bubbler valve closed
4/21/2012	12:07:17 PM	Main Vac valve opened
4/21/2012	12:07:17 PM	Helium MFC set to  0.000000
4/21/2012	12:07:17 PM	H2 MFC set to  0.000000
4/21/2012	12:07:17 PM	BCl3 MFC set to  0.000000
4/21/2012	12:07:17 PM	PH3 MFC set to  0.000000
4/21/2012	12:07:17 PM	SiCl4 MFC set to  0.000000
4/21/2012	12:07:17 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	12:07:18 PM	Tube furnace set to 0
4/21/2012	12:07:19 PM	Run finished at 12:07 PM
4/21/2012	12:07:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2012	12:07:42 PM	Recipe started at 12:07 PM
4/21/2012	12:07:42 PM	Helium valve closed
4/21/2012	12:07:42 PM	H2 valve closed
4/21/2012	12:07:42 PM	BCl3 valve closed
4/21/2012	12:07:42 PM	PH3 valve closed
4/21/2012	12:07:42 PM	SiCl4 pre valve closed
4/21/2012	12:07:42 PM	SiCl4 post valve closed
4/21/2012	12:07:42 PM	Bypass valve closed
4/21/2012	12:07:42 PM	Bubbler valve closed
4/21/2012	12:07:42 PM	Main Vac valve opened
4/21/2012	12:07:42 PM	Helium MFC set to  0.000000
4/21/2012	12:07:42 PM	H2 MFC set to  0.000000
4/21/2012	12:07:42 PM	BCl3 MFC set to  0.000000
4/21/2012	12:07:42 PM	PH3 MFC set to  0.000000
4/21/2012	12:07:42 PM	SiCl4 MFC set to  0.000000
4/21/2012	12:07:42 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	12:07:42 PM	Tube furnace set to 0
4/21/2012	1:37:43 PM	Helium valve closed
4/21/2012	1:37:43 PM	H2 valve closed
4/21/2012	1:37:43 PM	BCl3 valve closed
4/21/2012	1:37:43 PM	PH3 valve closed
4/21/2012	1:37:43 PM	SiCl4 pre valve closed
4/21/2012	1:37:43 PM	SiCl4 post valve closed
4/21/2012	1:37:43 PM	Main Vac valve closed
4/21/2012	1:37:43 PM	Bypass valve closed
4/21/2012	1:37:43 PM	Bubbler valve closed
4/21/2012	1:37:43 PM	Helium MFC set to  0.000000
4/21/2012	1:37:43 PM	H2 MFC set to  0.000000
4/21/2012	1:37:43 PM	BCl3 MFC set to  0.000000
4/21/2012	1:37:43 PM	PH3 MFC set to  0.000000
4/21/2012	1:37:43 PM	SiCl4 MFC set to  0.000000
4/21/2012	1:37:43 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	1:37:43 PM	Tube furnace set to 0
4/21/2012	1:37:46 PM	Helium valve closed
4/21/2012	1:37:46 PM	BCl3 valve closed
4/21/2012	1:37:46 PM	PH3 valve closed
4/21/2012	1:37:46 PM	SiCl4 pre valve closed
4/21/2012	1:37:46 PM	SiCl4 post valve closed
4/21/2012	1:37:46 PM	Main Vac valve closed
4/21/2012	1:37:46 PM	Bypass valve closed
4/21/2012	1:37:46 PM	Bubbler valve closed
4/21/2012	1:37:46 PM	H2 valve opened
4/21/2012	1:37:46 PM	Helium MFC set to  0.000000
4/21/2012	1:37:46 PM	H2 MFC set to  500.000000
4/21/2012	1:37:46 PM	BCl3 MFC set to  0.000000
4/21/2012	1:37:46 PM	PH3 MFC set to  0.000000
4/21/2012	1:37:46 PM	SiCl4 MFC set to  0.000000
4/21/2012	1:37:46 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	1:37:46 PM	Tube furnace set to 0
4/21/2012	1:38:52 PM	Helium valve closed
4/21/2012	1:38:52 PM	BCl3 valve closed
4/21/2012	1:38:52 PM	PH3 valve closed
4/21/2012	1:38:52 PM	SiCl4 pre valve closed
4/21/2012	1:38:52 PM	SiCl4 post valve closed
4/21/2012	1:38:52 PM	Main Vac valve closed
4/21/2012	1:38:52 PM	Bypass valve closed
4/21/2012	1:38:52 PM	H2 valve opened
4/21/2012	1:38:52 PM	Bubbler valve opened
4/21/2012	1:38:52 PM	Helium MFC set to  0.000000
4/21/2012	1:38:52 PM	H2 MFC set to  500.000000
4/21/2012	1:38:52 PM	BCl3 MFC set to  0.000000
4/21/2012	1:38:52 PM	PH3 MFC set to  0.000000
4/21/2012	1:38:52 PM	SiCl4 MFC set to  0.000000
4/21/2012	1:38:52 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	1:38:52 PM	Tube furnace set to 0
4/21/2012	1:38:53 PM	Helium valve closed
4/21/2012	1:38:53 PM	BCl3 valve closed
4/21/2012	1:38:53 PM	PH3 valve closed
4/21/2012	1:38:53 PM	SiCl4 pre valve closed
4/21/2012	1:38:53 PM	SiCl4 post valve closed
4/21/2012	1:38:53 PM	Main Vac valve closed
4/21/2012	1:38:53 PM	Bypass valve closed
4/21/2012	1:38:53 PM	H2 valve opened
4/21/2012	1:38:53 PM	Bubbler valve opened
4/21/2012	1:38:53 PM	Helium MFC set to  0.000000
4/21/2012	1:38:53 PM	H2 MFC set to  500.000000
4/21/2012	1:38:53 PM	BCl3 MFC set to  0.000000
4/21/2012	1:38:53 PM	PH3 MFC set to  0.000000
4/21/2012	1:38:53 PM	SiCl4 MFC set to  0.000000
4/21/2012	1:38:53 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	1:38:53 PM	Tube furnace set to 1000
4/21/2012	2:03:53 PM	Helium valve closed
4/21/2012	2:03:53 PM	PH3 valve closed
4/21/2012	2:03:53 PM	Main Vac valve closed
4/21/2012	2:03:53 PM	Bypass valve closed
4/21/2012	2:03:53 PM	H2 valve opened
4/21/2012	2:03:53 PM	BCl3 valve opened
4/21/2012	2:03:53 PM	SiCl4 pre valve opened
4/21/2012	2:03:53 PM	SiCl4 post valve opened
4/21/2012	2:03:53 PM	Bubbler valve opened
4/21/2012	2:03:53 PM	Helium MFC set to  0.000000
4/21/2012	2:03:53 PM	H2 MFC set to  450.000000
4/21/2012	2:03:53 PM	BCl3 MFC set to  1.000000
4/21/2012	2:03:53 PM	PH3 MFC set to  0.000000
4/21/2012	2:03:53 PM	SiCl4 MFC set to  50.000000
4/21/2012	2:03:53 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	2:03:53 PM	Tube furnace set to 1000
4/21/2012	2:26:53 PM	Helium valve closed
4/21/2012	2:26:53 PM	BCl3 valve closed
4/21/2012	2:26:53 PM	Main Vac valve closed
4/21/2012	2:26:53 PM	Bypass valve closed
4/21/2012	2:26:53 PM	H2 valve opened
4/21/2012	2:26:53 PM	PH3 valve opened
4/21/2012	2:26:53 PM	SiCl4 pre valve opened
4/21/2012	2:26:53 PM	SiCl4 post valve opened
4/21/2012	2:26:53 PM	Bubbler valve opened
4/21/2012	2:26:53 PM	Helium MFC set to  0.000000
4/21/2012	2:26:53 PM	H2 MFC set to  445.000000
4/21/2012	2:26:53 PM	BCl3 MFC set to  0.000000
4/21/2012	2:26:53 PM	PH3 MFC set to  5.000000
4/21/2012	2:26:53 PM	SiCl4 MFC set to  50.000000
4/21/2012	2:26:53 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	2:26:53 PM	Tube furnace set to 1000
4/21/2012	2:28:53 PM	Helium valve closed
4/21/2012	2:28:53 PM	BCl3 valve closed
4/21/2012	2:28:53 PM	PH3 valve closed
4/21/2012	2:28:53 PM	SiCl4 pre valve closed
4/21/2012	2:28:53 PM	SiCl4 post valve closed
4/21/2012	2:28:53 PM	Main Vac valve closed
4/21/2012	2:28:53 PM	Bypass valve closed
4/21/2012	2:28:53 PM	H2 valve opened
4/21/2012	2:28:53 PM	Bubbler valve opened
4/21/2012	2:28:53 PM	Helium MFC set to  0.000000
4/21/2012	2:28:53 PM	H2 MFC set to  500.000000
4/21/2012	2:28:53 PM	BCl3 MFC set to  0.000000
4/21/2012	2:28:53 PM	PH3 MFC set to  0.000000
4/21/2012	2:28:53 PM	SiCl4 MFC set to  0.000000
4/21/2012	2:28:53 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	2:28:54 PM	Tube furnace set to 750
4/21/2012	2:43:54 PM	H2 valve closed
4/21/2012	2:43:54 PM	BCl3 valve closed
4/21/2012	2:43:54 PM	PH3 valve closed
4/21/2012	2:43:54 PM	SiCl4 pre valve closed
4/21/2012	2:43:54 PM	SiCl4 post valve closed
4/21/2012	2:43:54 PM	Main Vac valve closed
4/21/2012	2:43:54 PM	Bypass valve closed
4/21/2012	2:43:54 PM	Helium valve opened
4/21/2012	2:43:54 PM	Bubbler valve opened
4/21/2012	2:43:54 PM	Helium MFC set to  500.000000
4/21/2012	2:43:54 PM	H2 MFC set to  0.000000
4/21/2012	2:43:54 PM	BCl3 MFC set to  0.000000
4/21/2012	2:43:54 PM	PH3 MFC set to  0.000000
4/21/2012	2:43:54 PM	SiCl4 MFC set to  0.000000
4/21/2012	2:43:54 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	2:43:54 PM	Tube furnace set to 0
4/21/2012	3:03:54 PM	Helium valve closed
4/21/2012	3:03:54 PM	H2 valve closed
4/21/2012	3:03:54 PM	BCl3 valve closed
4/21/2012	3:03:54 PM	PH3 valve closed
4/21/2012	3:03:54 PM	SiCl4 pre valve closed
4/21/2012	3:03:54 PM	SiCl4 post valve closed
4/21/2012	3:03:54 PM	Main Vac valve closed
4/21/2012	3:03:54 PM	Bypass valve closed
4/21/2012	3:03:54 PM	Bubbler valve closed
4/21/2012	3:03:54 PM	Helium MFC set to  0.000000
4/21/2012	3:03:54 PM	H2 MFC set to  0.000000
4/21/2012	3:03:54 PM	BCl3 MFC set to  0.000000
4/21/2012	3:03:54 PM	PH3 MFC set to  0.000000
4/21/2012	3:03:54 PM	SiCl4 MFC set to  0.000000
4/21/2012	3:03:54 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	3:03:54 PM	Tube furnace set to 0
4/21/2012	3:23:54 PM	Helium valve closed
4/21/2012	3:23:54 PM	H2 valve closed
4/21/2012	3:23:54 PM	BCl3 valve closed
4/21/2012	3:23:54 PM	PH3 valve closed
4/21/2012	3:23:54 PM	SiCl4 pre valve closed
4/21/2012	3:23:54 PM	SiCl4 post valve closed
4/21/2012	3:23:54 PM	Main Vac valve closed
4/21/2012	3:23:54 PM	Bubbler valve closed
4/21/2012	3:23:54 PM	Bypass valve opened
4/21/2012	3:23:54 PM	Helium MFC set to  0.000000
4/21/2012	3:23:54 PM	H2 MFC set to  0.000000
4/21/2012	3:23:54 PM	BCl3 MFC set to  0.000000
4/21/2012	3:23:54 PM	PH3 MFC set to  0.000000
4/21/2012	3:23:54 PM	SiCl4 MFC set to  0.000000
4/21/2012	3:23:54 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	3:23:54 PM	Tube furnace set to 0
4/21/2012	3:24:40 PM	Helium valve closed
4/21/2012	3:24:40 PM	H2 valve closed
4/21/2012	3:24:40 PM	BCl3 valve closed
4/21/2012	3:24:40 PM	PH3 valve closed
4/21/2012	3:24:40 PM	SiCl4 pre valve closed
4/21/2012	3:24:40 PM	SiCl4 post valve closed
4/21/2012	3:24:40 PM	Main Vac valve closed
4/21/2012	3:24:40 PM	Bubbler valve closed
4/21/2012	3:24:40 PM	Bypass valve opened
4/21/2012	3:24:40 PM	Helium MFC set to  0.000000
4/21/2012	3:24:40 PM	H2 MFC set to  0.000000
4/21/2012	3:24:40 PM	BCl3 MFC set to  0.000000
4/21/2012	3:24:40 PM	PH3 MFC set to  0.000000
4/21/2012	3:24:40 PM	SiCl4 MFC set to  0.000000
4/21/2012	3:24:40 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	3:24:40 PM	Tube furnace set to 0
4/21/2012	3:25:40 PM	Helium valve closed
4/21/2012	3:25:40 PM	H2 valve closed
4/21/2012	3:25:40 PM	BCl3 valve closed
4/21/2012	3:25:40 PM	PH3 valve closed
4/21/2012	3:25:40 PM	SiCl4 pre valve closed
4/21/2012	3:25:40 PM	SiCl4 post valve closed
4/21/2012	3:25:40 PM	Bypass valve closed
4/21/2012	3:25:40 PM	Bubbler valve closed
4/21/2012	3:25:40 PM	Main Vac valve opened
4/21/2012	3:25:40 PM	Helium MFC set to  0.000000
4/21/2012	3:25:40 PM	H2 MFC set to  0.000000
4/21/2012	3:25:40 PM	BCl3 MFC set to  0.000000
4/21/2012	3:25:40 PM	PH3 MFC set to  0.000000
4/21/2012	3:25:40 PM	SiCl4 MFC set to  0.000000
4/21/2012	3:25:40 PM	Bypass solenoid MFC set to  0.000000
4/21/2012	3:25:40 PM	Tube furnace set to 0
4/21/2012	4:25:40 PM	Run finished at 4:25 PM
